Study On Real-time 2D Micro Angle Sensor

In the system of quality guarantee of modern enterprises, online detecting device,namely , detecting system that directly control quality of product procedure and runof technics, take on a important action. With the further development of precisionmachining and super high speed process, it requires new desire with the online testingprecision and speed, the study of micro angle measurement methods with highaccuracy and resolution play a more and more important role in this field.Nowadays, measurement accuracy and precision have been achieved a high level byusing various kinds of advanced measurement methods and complicated instruments.However, the traditional angle measurement instruments, such as laser interferometerand optic-electronic autocollimator, can hardly be used as angle sensor in on-linemeasurement because they are bulky, complicated, expensive, difficult to assemblemulti-dimension measuring system and demanding strict work environment.This task is present on background above. To solve problem above, based on theeffect of the optical internal reflection ,we design and make a new type oftwo-dimension micro angle sensor by using new angle measurement method that isdifferent from the traditional ones, and can make up for the shortcomings mentionedabove. This work prepares for the next step of designing a multi-dimension angle anddisplacement measurement system and to make a foundation of realizing themeasurement of the moving status or errors of precision machining tool or coordinatemeasurement machine. We adopt detecting circuit based on C6711DSK process highspeed data sampling, it make systemic measurement precision and response speedmeet requires of online detecting currently.Four items listed below show the mainwork that has been done in this paper.1.The purpose of the study is presented. A large number of references arecollected and referred to, leading to an overview of the current national andinternational situation and developmental trends in the field of micro anglemeasurement methods.2.The new angle measurement method based on internal reflection effectivenessdiscussed theoretically.3. based on theoretical analysis , have achieved the mechanical design of thesensor.3.the measuring circuits based on C6711DSK have been designed and fabricated.The technical characteristics and performance have been primarily discussedby experiment results. The calibrated method is also presented.4.The evaluation method of the sensor is presented. The error factors that affectthe measuring accuracy of the measurement system are discussed.