The R&D Of The Control System Of The Wafer-Handling Robot

The intergrated circuit (IC) is the hard-core of the electron information industry, and the equipments used in IC play an important role in the semiconductor industry. The automated wafer-handling robot is one of the most important parts of the IC equipments. The speed and precision of the automated wafer-handling robot take the responsibility of the integrated circuit quality. Therefore, the mechanism system and the control system of the automated wafer-handling robot have been developed.At first, in this paper, the mechanical structure and the transmission system principle of the wafer-handling robot are studied, considering of the special need of wafer handling. It can be the foundation of the latter content, such as interpolation arithmetic, manual teaching and the adjustment of PID and so on.Secondly, considering the characteristic of the wafer-handling robot, the controlling of " PC+PMAC " is applied. The PC is in charge of the non real-time motion control, and the PMAC is in charge of real-time tasks. The technologies of the interface among motion contorller, servo unit and coder are studyed. 3-Axis open numerical control system has been developed for the wafer-handling robot.In the aspect of the software controlling, man machine interface provided with the style of commercial control system and the advantage of Windows programming is applied. The way of the object oriented programming (Visual Basic) and the modularization is used. Real-time control of the servo unit, the selecting and showing of the data state, the transferring of the PLC programme and the manual teaching are all finished. Additional, assistant programmes are also developed, so that the motion control of the wafer-handling robot can be carried out clearly.At last, the mechanism system has been assembled and the control system has been debugged very well. The debug of the whole wafer-handling robot has been done. The detail debugging process is introduced. Based on the practice, the software controlling has been update and modified frequently, and the relational problems in the debugging process have been solved.