Development And Control System Design Of A Wafer-handling Robot

This thesis manily focus on the development of a high precision 4-DOF wafer-handling robot, which is SCARA (Selective Compliance Assembly Robot Armrobotic) mechanical model. The main function of wafer handling robot is to transfer wafer in different work places quickly, efficiently and reliably.Control system is the wafer-handling robot's nerve centre. According to the characteristic of its motion trajectory and work environment, the control system based on PC and motion control card is designed, and the velocity control mode of servo system is adopted. While in the real manufacturing environment, the robotic arm must be safe, stable and high precision, this study focus on many aspects to achieve those three requirements.(1) The mechanical structure of the robotic arm is dicussed in detail, and finally a 4-DOF SCARA model robot is designed according to the actual demands in the factory. We choose the direct-drive motor to get a high performance.(2) Both kinamic and dynamic fuctions are described.(3) Formulate a schame for redundancy control of robot manipulators and do simulation in Matlab.(4) Run the wafer-handling robot and do experiment on backlash compensation.The wafer-handling robot designed in this paper shows qualities of fast and high precision in the xperiments, and would satisfy the real factory requirements well.