Study And Implementation Of Trajectory Planning For Wafer Handling Robot

As the foundation of electronic information industry, integrated circuit(IC) is the driving force that promotes the development of national politics, economy and defense. Performance improvement of IC manufacturing equipments plays a huge role in the developing process of IC industry. Wafer handling robot is the key equipment of wafer handling system which is the essential component of IC manufacturing equipments, and its performance directly influences the production efficiency and manufacturing quality of the whole system. Aiming at the rapidity and smoothness of wafer handling robot, this paper focuses on the study of trajectory planning.First, according to the structure of wafer handling robot and drive principle, kinematic equations are derived in accordance with the D-H method, and dynamic equations are derived by using the Lagrange equation. All above provide the theoretical basis for trajectory planning.In order to improve the rapidity and smoothness of wafer handling robot, taking the time interval of the nodes in the joint space as the design variables, a time and energy integrated optimal trajectory planning method is proposed, in which the trajectory is constructed by using B-spline function. Aiming at the nonlinearity of trajectory optimization and poor local-searching ability of genetic algorithm, a kind of adaptive hybrid genetic algorithm is designed. And also the algorithm and trajectory planning the simulation of are realized by using MATLAB. The results show that the method mentioned above can effectively solve the problem of time and energy consumption, the trajectory obtained is smooth and provides the necessary data for simulation based on ADAMS.Three-dimensional model is created by using Solidworks, and the simulation model is established in ADAMS. The simulation is carried out by leading the optimization results into ADAMS. By comparing the results between MATLAB and ADAMS, the trajectory planning method proposed is proved effective.Finally, motion control system of wafer handling robot is set up to implement the trajectory planning. Control program is completed and the experiment is carried out. The results show that the method proposed can satisfy the performance requirements of robot. Furthermore, the comparison test is carried out by using two different interpolation methods, and the results show that the trajectory constructed by using quintic B-spline is helpful to improve tracking precision.