A Fabrication Method Of Field Emission Array

Field emitter cathode is a nuclear part which be used to fabricate new styles of various of pressure sensors and display apparatuses, and it is particularly attracted because of its wide application perspective. The article mainly concern the quality and theory about field emitter cathode and a serial of work about theory and experiments uncovered, the main research work of this article is arranged as follow:1. The historical situation and various of craftwork used to fabricate field emitter cathode is summarized, two craftwork methods are ensured which including laser micro-process and wet etching.2. Relevant basic theory about field emitter is researched, significances of two craftwork characteristics are analyzed using related theory. Moreover, the relationship between the field emission current and the work function of FEA and the temperature is analyzed, which points out the orientation which used to select a suitable material of field emitter.3. After the craftwork process and characteristics had been studied, relevant experiment was designed to determine the possible result and found the craftwork exist many defects: the precision of this craftwork is difficult to reach our actual demands.4. Compare with laser micro-process, by wet etching the cones of same shape whose internal surface is smooth can be etched in the surface of Si and the whole process can be well controlled. The result proves that polymer micro-tip array of good quality can be attained applying the craftwork.In a word, A craft method used to fabricate polymer micro-tip was introduced which can provide theory and experimental argument to the fabrication of new style of photoelectron apparatus.