Research For High-Accuracy Temperature Measurement Method Based On VME Bus

The temperature controlling accuracy is ±0.02℃inside the scanner being developed. The temperature measurement system is the part of contamination and temperature control system in this system, so its measurement accuracy is important for contamination and temperature control system and the lithography tool. A method of high temperature measurement accuracy is given on the basis of summarization of all kinds of temperature measurement technology. A method of solving for all error of temperature measurement is given. There are pulse noise and period noise in the output of the data acquisition card V460. Middle value filter for pulse noise and moving average filter for period noise are used in the filter with automatic reset function. There is no noise in the result of filter that follows the change of temperature. The filter gives a good result of filter in the application. The value of resistance transform into the value of temperature with the arithmetic of Newton iterates. The arithmetic of Newton iterates can give a precision result. The software architecture of temperature measurement system is designed with the idea of RPC. The interface of upper software calls remotely the program of temperature measurement of lower software. The software of temperature measurement system can set parameter of board measurement and parameter of channel measurement and parameter of sensor. The temperature measurement system can use many kinds of sensor if you change parameter of sensor. The system can measure many kinds of object if you change parameter of filter. The temperature measurement experiment has been done to ensure temperature measurement accuracy within the desired range. The system measurement accuracy can be got by comparing the measured value of 1590 and the temperature measurement system when they are measuring the same object. The result of the temperature measurement experiment is the measurement accuracy of system is ±0.005℃.