Research On Carbon Nanotube Embedded Cantilever Biosensing Technology

Thanks to the NEMS fabrication technology, cantilever now sees more and more application in the field of biosensing. However, the traditional read-out methods put limit on this technology. Optical read-out method is hard to put into integration and the resolution of piezoresistance read-out method is far from satisfactory in many applications. In order to solve this problem, this thesis brings up a method of embedding a single-walled carbon nanotube on the surface of cantilever serving as stress transducer to raise resolution.This thesis evaluates the performance of a MOSFET embedded cantilever and a CNT embedded one, and compare the resolution of the two. Finally, we found the resolution will rise dramatically if replace piezoresistance with SWCNT in the read-out system.