Analysis Of Main Tube Design Of Field Emission Gun Transmission Electron Microscopy

With the advent of electron microscopy, people had a more powerful tool to explore the microscopic world. After 70 years of development, electron microscopy has become an indispensable tool to modern science and technology. Recently, electron microscopy has made substantial progress in China. However, compared with overseas, China is currently relatively weak on the development of electron microscopy especially in stability, reliability and resolution. At present, China has not yet formed an industrial chain of transmission electron microscopy. Therefore, there is great significance on the development of the high-resolution transmission electron microscopy.In this paper, Based on electron optics, the different parts of the main tube were calculated and analyzed by using a finite element analysis software ANSYS. At different loading, the stress and strain distribution of the viewing chamber is numerically simulated. At the same time, The stress and strain state of the integration design of the viewing chamber and the airlock valve was simulated numerically. And the results of stress and strain distribution proved that the integration design of the viewing chamber and the airlock valve was feasible. On the other hand, the thermal analysis was carried out on the objective lens, the intermediate lens and the projector lens and the condenser lens. the feasibility of the design was verified by the results of finite element analysis calculation, such as the stress and strain distribution, thermal stability, thermal stress distribution.In summuny, the calculated results proved that the design of TDX200 main tube was reliable, which also provided reliable data for the further optimization of the design and manufacturing on transmission electron microscopy.