Study On Integration And Packaging Of Monolithic Microwave Micro-plasma Source

The microwave micro-plasma source is of important application value in the industrial field. These micro-plasma sources capable of creating controlled small-sized discharge are desirable for applications such as bio-MEMS sterilization, small-scale materials processing, micro-chemical analysis system and micro-propulsion. Based on the need of the miniaturized portable devices, the microwave frequency at 2.45GHz is chosen. Such micro-plasma excitation can be integrated into small devices and offer the advantages of small size, low power, long-time operation in atmospheric pressure.In order to realize a portable micro-plasma source, a microwave solid state source must be presented first, which is also named microwave oscillator. In this thesis two kinds of 2.45GHz negative resistance oscillators were designed. The first one is microwave transistor negative resistance oscillator, which adopts co-basis circuit and basis positive feedback inductance. According to the oscillation condition, the matching source and the matching load networks of the two-port network could be calculated. Then ADS is used to optimize and simulate the circuit. The second one is a CMOS LC oscillator and its transient simulation results were given in Candence.Finally, this thesis gives a general introduction to the integration and packaging of monolithic microwave micro-plasma source, including block diagram and packaging technology. Also presented was the simulated reflection coefficient of the resonator after the plasma was excited.