The Research Of Direct-drive Motor Control Method Based On Vacuum Robot

In nowadays, the level of the semiconductor industry of a country reveals the level of the high technology of the country. A vacuum manipulator is indispensable in that it transfers wafer between neighboring chambers. Due to their sensitive nature and high commercial value, relevant techniques are being blocked by Western cooperation. Counterpart researches are hugely required, moreover, in the vacuum chamber, in order to achieve high precision, high speed, pollution-free, maintenance-free requirments,reduce the space is needed, and also need to simplify the transmission mechanism to reduce the accumulated error. Therefore, using the motor with a gearbox can not meet the requirements, which put forward the requirements for direct-drive mode.This thesis has carried out research on the control method of the PMSM (Permanent Magnet Synchronous Motor) which is used in vacuum manipulator.Since direct-drive mode minus the intermediate transmission mechanism, it is possible to obtain a higher positioning accuracy and better dynamic performance than the original mode.However, there are also shortcomings.First of all, the need for high-precision motor and position sensor, the system is very costly, second, the system to external disturbances and load disturbances is more sensitive.Therefore, the control system must have a strong anti-disturbance ability.The thesis analyzes the key issues need to solve about the PMSM. Based on studies on catogaries of advance control approaches, a systematic research has been done toward the model making of direct-drive PMSM, sensorless control, traditional control and robust control. The paper presents a kind of control approach which bases on MRACS (Model Reference Adaptive Control System) and fuzzy arithmetic. The results show that it has outstanding advantages of PMSM control. In addition, this paper has also studied PC and DSP test algorithmic program, and it is convenient for the further algorithmic study.