Research On The Difference Multi-Axis (Six-Axis) Piezoelectricity Force Sensor

The multi-axis force sensor (MAFS)is not only the most important sensor ofrealizing the intelligent and human-like robot, but also the basis for engineeringmechanical test and robot motion control. With the development of robotictechnology , MAFS is widely applied many fields .In this dissertation ,we not onlyanalyzed and derived the sensor's mathematical model based on the theory ofpiezoelectricity ,but also designed the difference piezoelectric multi-dimension forcesensor .Meanwhile ,the dynamic and static state calibration system of this sensor havecarefully researched .And most importantly, the design of the secondaryappearance-quasis-statice state charge amplifier was sucessful.The key componentsare as follows:①Based on the principle of biologic piezoelectric effective and mechanism ofhuman's skin, the thesis proposed an innovative composing force sensor designmethod , and finished the design job with this method. At the same time , themathematical model of the difference piezoelectricity multi-dimension force sensorwas derived , and the experimental results indicated that the sensor which can greatlydecrease random error of sensor, system error and the disturbance of the inter-polebetween multi-dimension has the following merits: simple inner structure, easy tomanufactureing, small volume, high sensitivity, high syntonic frequency and smalltemperature error and so on.②With the analysis of the common calibration devices, and the theory ofcounter poise loading.The dynamic and static state calibration device and thecalibration system were designed based on this difference piezoelectricitymulti-dimension force sensor, and we derived the mathematical expression of thestandard force.③We completed the optimal design of the secondary appearance of quasi-staticstate charge amplifier, and got detailed and accurate analysis of the basis programcontrol principle for the charge amplifier realization.④Under the current experimental circumstance, the design and manufacturing ofthe fundamental testing experiment with the quasi-static state charge amplifier wascompleted . Compared with the commoncharge amplifier , the testing results of lowerlimit frequencyshowed that this device could measure up with the demand. ⑤We had applied for the practical new pattern patent with this multi-axis forcesensor (the patent application code is: 200320123985.4) .