Research On Key Technologies Of Three-D Force Sensor Based On Piezoelectricity Crystal And Calibrating Device For Multi-D Force Sensor

The multi dimensional force sensor is not only the most important sensor of realizing the subhuman and intellectualized robot, but also the groundwork of engineering mechanical testing and measure. The use field of multi dimensional force sensor is more and more wide. For example: robot, manufacturing industry, medicine, sport competition, avigation and spaceflight and so on.In this article we researched and designed the three-d force sensor based on piezoelectricity crystal, researched the structure, technique and the mathematical model based on this sensor, analyzed the characteristic of the sensor by using the finite element analysis(FEA) and the calculate analysis and designed the calibrating device for multi dimensional force sensor.The main work completed includes:①Analyzed the development situation of the multi dimensional force sensor and the calibrating device for multi dimensional force sensor.②Designed the structure of the sensor by using the quartz as the sensing element. Researched and analyzed the sensor's mathematical model, and the disquisitive result indicate that the sensor has the merit of simple frame, easy to fabricate, small volume, high sensibility, high syntonic frequency, small temperature error, can greatly decrease random error of sensor, system error and the disturbance of the inter-pole between multi-dimension and so on.③Analyzed the sensor model in the way of FEA. Researched the static and dynamic state characteristic. Such as: sensitivity, coupling interference, translation efficiency and natural frequency. The result has proved the rationality of the design.④Analyzed the difference of the calculate analysis result and the FEA result. By using the amend factor, make up the error of the calculate analysis method which is brought by the simplify calculating on the parameter of the sensor model.⑤Designed the dynamic and static state calibration device based on researching and analyzing in common use the calibration device, and the theory of counter poise loading,The research work has provided an important foundation for developing a new three dimensional piezoelectric force sensor.