Study On 2D Micro Angle Sensor Based On Internal Reflection Effectiveness

Angle measurement is one of the most important parts in geometry measurementfields, which is used broadly in industry, military affairs, astronautics, navigation andcommunication. With the further development of nano-measurement technology, thestudy of micro angle measurement methods with high accuracy and resolution playa more and more important role in this field. Nowadays, measurement accuracy andprecision have been achieved a high level by using various kinds of advancedmeasurement methods and complicated instruments. However, the traditional anglemeasurement instruments, such as laser interferometer and optic-electronicautocollimator, can hardly be used as angle sensor in on-line measurement becausethey are bulky, complicated, expensive, difficult to assemble multi-dimensionmeasuring system and demanding strict work environment. In this paper, we design a new type of two-dimension micro angle sensor byusing new angle measurement method that is different from the traditional ones, andcan make up for the shortcomings mentioned above. This work prepares for the nextstep of designing a multi-dimension angle and displacement measurement system andto make a foundation of realizing the measurement of the moving status or errors ofprecision machining tool or coordinate measurement machine. Four items listedbelow show the main work that has been done in this paper. 1．The purpose of the study is presented. A large number of references are collected and referred to, leading to an overview of the current national and international situation and developmental trends in the field of micro angle measurement methods. 2．The new angle measurement method based on internal reflection effectiveness discussed theoretically. 3．The two-dimension angle sensor system and the measuring circuits based on MCU have been designed and fabricated. The technical characteristics and performance have been primarily discussed by experiment results. The calibrated method is also presented later. 4．The evaluation method of the critical angle sensor is presented. The error factors that affect the measuring accuracy of the measurement system are discussed.