Design Of The Setup And Control Software Of Laser Writing System

Photo masks are the backbone of micro-fabrication industries. Currently they are fabricated by lithographic process, which is very expensive and time consuming since it is a several step process. The laser direct writing system is the kind of tool that exposes the precision patterns by the micro-spot on the photosensitive material. This is a single step process and comparatively cheaper and faster than lithography.The laser direct writing system with polar coordinate and Cartesian coordinate is described in this paper. The properties of the key optical and electrical devices and the controlling mode in the system are put forwards. Using the polar coordinate lines with different directions and the circulars with the same axis can be written together.By using He-Cd laser (442nm) as writing light source, the system can directly write line with width 05#m on a sample. The *.dxf format file is used widely in the industries which stores data in vectorial mode. In the paper a new *.ldw file format to get the data from *.dxf format file is defined for supporting the vectorial model scanning of laser direct writing system.How to increase the depth of focus (DOF) of optical system is also discussed in this paper when writing pattern on the concave plates. Besides this, a new way to write lines with high resolution is proposed which is suitable to write the grating lines efficiently.The experimental results are presented and discussed in Sec.5. The factors attributed to the results are also given. Finally further research directions are discussed.