Charge Coupled Device (CCD) is a new kind of semiconductor solid state imaging device developed in 1 970s. It possess light weight, small volume, long life, low power consumption~ high dependability, high response speed, high sensitivity, connect with computer easily~ maneuverable, maintenance easily, etc. Just because of these traits, CCD received high attention as soon as it was borned. It occupies an inportant place in the military affairs field and commercial field. Alone with the development of the technology, in particular the development of the latter-day抯 electronics, the measuring technique of geometrical sense demand high precision, high efficiency, automatization, dynamic detection, adaptive control, etc. The measuring system with CCD has an advantage on the geometrical sense meterage , such as high precision, high efficiency , automatization, noncontact, etc. It adapts to measure minisize especially. Firstly the paper presents the development of the CCD and the significance of using CCD to measure minisize, secondly the paper presents the study on how to improve the measuring accuracy of the measuring system with CCD in detail, finally the paper presents the measured data and error analysis of the simulated test to support the preceding study.
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