The Performance Testing Of Compliant Electrothermal Microgripper

Microelectronic mechanical systems (MEMS) testing in all aspects primarily used to provide data feedback for scientific research and product development. With the development of MEMS technology, performing test, such as structure test, materials test, and sports test for MEMS devices is increasingly becoming serious problem.Microgripper is one of the most important elements in MEMS; it applied to gripping, movement and assembly operation for small targets. To research and develop microgripper applied in microoperation and microassembly has become one of important fields of micro-nanotechnology research in recent years. In this paper, electrothermally actuated microgripper is studied, and its output displacement,temperature distribution are tested and researched in order to the design and practical application.Firstly, in this paper, the hardware and software design of the microgripper displacement test system is completed, and the displacement of microgripper testing experiments is carried. The test software is compiled by the LabVIEW graphical programming language, the program can be realized image acquisition, image processing, displacement measurement and image calibration, and image annotation features. During the displacement test, you can mark the image size, and display scale; A detailed image calibration method was realized through a desktop micrometer TS-M1, the resolution is 0.33μm, the least measurement error is±1μm. The variation of displacement with voltage is summarized and the factors which affect the output displacement are analyzed and compared through the testing experiments.Use infrared camera for temperature testing according to the small size of microgripper, Because of the electrode structure of microgripper, the SU-8 adhesive emissivity obtained by the dual-temperature method. The temperature distribution and trend of Nickel and SU-8 microgripper are analyzed, the SU-8 material reduce the surface temperature of microgripper is verified through the temperature testing, and meet the design requirements.