The Preparation Of WS₂/MoS₂/C Composite Films By Reaction-sputtering And Co-sputtering

In order to expand the application in humid conditions, the WS2/MoS2/C composite films were prepared by reaction-sputtering and co-sputtering, the pure MoS2 film was prepared as the contrast. The microstructure and morphology of the composite films were analyzed, and the tribological properties of the films were tested, too.WS2/MoS2/C composite lubricating films were prepared in an Ar/C2H2 atmosphere by magnetron reaction-sputtering using a WS2/MoS2 composite target. X-ray diffraction, energy dispersive X-ray detector, Field Emission Scanning Electron Microscope were used to analyze the composition and microstructure of the films. The MFT-4000 material surface properties tester were used to investigate the tribological performance of the films at room temperature (20~25°C) in air (RH=60%). Axio CSM 700 True Color high-resolution confocal microscope was used to observe the worn scratches of the films. A CSM nano-indenter was used to evaluate the mechanical properties of the films. WS-2002 Automatic Scratch Tester was used to test the cohesion between the films and the substrates. The results show that since C was added in the composite films, the WS2/MoS2/C composite film has a compact microstructure. There is an (002) diffraction peak, which is good for the improvement of the frictional performace. It is also shown that the composite films have much superior tribological performance with lower friction coefficient and better wear resistance than pure MoS2 film in humid atmospheric conditions at room temperature. An increase in hardness of nearly one order of magnitude was reached, too. The cohesion strength between the films and the substrate is about 70 N, since there is a Ti-interlayer.WS2/MoS2/C composite lubricating films was prepared by co-sputtering using a WS2/MoS2 composite target and a C target. X-ray diffraction, energy dispersive X-ray detector were used to analyze the composition and microstructure of the films. The MFT-4000 material surface properties tester were used to investigate the tribological performance of the films at room temperature (20~25°C) in air (RH=60%). A CSM nano-indenter was used to evaluate the mechanical properties of the films. WS-2002 Automatic Scratch Tester was used to test the cohesion between the films and the substrates. It is shown that the composite films have much superior tribological performance with lower friction coefficient than pure MoS2 film in humid atmospheric conditions at room temperature. An increase in hardness of nearly one order of magnitude was reached, too. The cohesion strength between the films and the substrate is about 70 N, since there is a Ti-interlayer.