Based on the using requirements of narrow-band pass filter, through analyzing the optical characters of material, film design and methods of thickness monitor, as well as optimizing technical parameters, we deposited narrow-band pass filter film on substrate of HB830 optical glass by means of vacuum deposition with electronic beam and ion-beam assisted deposition system. TiO2 and SiO2 are chose as the materials.After coating, the transmittance at wavelength 905nm is higher than 86%, the half spike width is 23nm, and solved the problem of central wavelength drift and absorption. The film could suffer the laser radiation and extremely formidable environment testing.
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