Calculation Of Light Scattering By Single Randomly-Shaped Particle On Plane

The study of light scattering of particles will theoretically benefit tests of semiconductor wafer. During the T-matrix method of calculating light scattering by particle, incident and scattered fields are expand into spherical vector wave functions: which, via their relationship derived from the Maxwell equations, leads to the T-matrix, a transferring matrix between expansion coefficients of fields. Superellipsoid function is utilized to simulate various shapes of particles, and some geometric information on the particle is obtained by triangularizing its surface. With the geometric information in combination with null-field, T-matrix of arbitrary- shaped particle can be found. T-matrix method is also introduced into light scattering from particles on a plane, in which there are three incidences: directly incident field, reflected field and interacting field. The reflection matrix is used to calculate the interacting field, and it is revolved via interacting expansion of plane wave and spherical wave. At the end, a emulating result is given.