Study Of Light Scattering Calculation And Visualization By Single Sphere On A Plane

Defects or their effects are the main reason of invalidating integrated circuit (IC) chips. In order to improve inspectability for microparticles defect of laser inspection system, a mathematical model of a spherical particle on a semiconductor surface is founded, through which scattering theories and data visualization of scattering field are studied. Then the intuitional images of scattered field are gained. So it will be helpful for engineers to design delicacy and effective diagnostic tools. In scattering theories, T-matrix is simplified and reformed according as the characteristic of axisymmetric particle from the process of deriving T-matrix expression with which light scattering of a particle is calculated. When the effect of a plane is considered, reflection matrix is educed to express this interaction between a particle and a plane. According these, a matrix equation is founded to calculate the total scattered field coefficients and the values of scattered field are gotten. In data visualization of scattering field, a model of partitioned gridding on the hemispherical surface is constructed according to the character of produced data. And the image of scattered field is produced on the basis of the coincidence of a correspondence between the value of color quantitatively expressed by the data of scattering field and grid coordinates. Finally, the different scattering images are made through changing input parameter of calculating scattered field, by comparing which some useful conclusions are drawn.