| A generic merged process has been developed for the integration of multi-element micromachined diaphragm transducers and on-chip interface electronics on a single chip. This monolithic chip simultaneously measures flow velocity, direction, gas type, pressure, and temperature from the five diaphragm windows, allowing the determination of true mass flow in gas control systems.;Generic thermal models have been devised to analyze the heat transfer mechanisms in planar diaphragm structures. These analytical models have been confirmed by two-dimensional finite-element (FEM) simulations and by experimental measurements. Diaphragm windows formed using 1.5;A multi-sensor chip has been fabricated and characterized by integrating four distinct planar diaphragm transducers on dielectric windows separately etched on a single chip. Three thermally-based transducers are supported on dielectric windows defined by a 15;On-chip circuitry has been fabricated on the unetched bulk region of the chip using a standard 3;The electrothermal circuit applications of the planar diaphragm structure have also been explored. An rms-dc converter formed using his structure has achieved a conversion nonlinearity less than 1%, high sensitivity to low-level signals, and a bandwidth of over 20... |
