| A systematic approach to improving the overall accuracy of multi-axis laser machine tools for the manufacturing of display or semiconductor devices is necessary for the fast development of automated fine manufacturing process, since their errors can greatly inhibit the quality of the pattern generation. As a consequence of the development of electromagnetic optical hardware, active error compensation methods are gaining more acceptance.; In this study, an attempt has been made to develop an effective system which can easily compensate for the volumetric errors that have induced the optical path of the laser beam of a multi axis laser machine to stray. This system can provide the ability to compensate for the error of the laser beam without compensating for each axis of the stage of the multi-axis laser machine.; Due to the difficulties in volumetric error analysis of a laser machining center having a non-contact machining method, the analysis is performed by the indirect method; to measure all error components of the structural elements of the machine tool and then to synthesize them in order to estimate the volumetric errors of the mirror at the last reflecting position. The FSM (Fast Steering Mirror) is introduced to compensate the optical path of the laser beam from the volumetric errors of the mechanical element of the machine tool through adjustment of the direction of the mirror of the FSM; a kind of adaptive optics. The development of such a system consists of four steps.; The effectiveness of the proposed scheme will be demonstrated through simulations and experiments. Here, the patterning error will be compensated through simulation study and experimental work based on the experimental data. Also, the direct laser patterning will be demonstrated through ASAP (Advanced Simulation Applied Program) software to show the effectiveness of the proposed approach. |
