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Defect Analysis of the Indium-Gallium-Zinc-Oxygen System for Transparent Oxide Semiconductor Applications

Posted on:2014-08-13Degree:Ph.DType:Dissertation
University:Northwestern UniversityCandidate:Adler, Alexander UFull Text:PDF
GTID:1458390005490372Subject:Engineering
Abstract/Summary:
The defect chemistry of compounds in the InGaO3(ZnO) k (IGZO) system (k=1, 2, and 3) was investigated via analysis of the dependence of conductivity and thermopower on oxygen partial pressure (pO2) at high temperature (750°C), i.e., Brouwer analysis. Defect mechanisms were deduced based on the resulting Brouwer slopes for all the k-phases, the prevailing point defect species were proposed to be the Ga antisite defect (Ga·Zn ionically compensated by indium vacancies ;{primeprimeprime}_{In}})...
Keywords/Search Tags:Defect
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