| Phase change (PC) chalcogenide materials are utilized as signal switches in electronic systems as an alternative to conventional transistors. Switching between two electrical resistance levels in the material is realized by atomic force microscopy (AFM) -type probes. A three-terminal electronic switch using PC materials in reconfigurable radio frequency (RF) inductors is demonstrated in this switch topology.;We present the design and modeling approach to characterize the electrical and thermal properties of PC material switches. Analysis of the RF performance focuses on minimizing degradation of self-resonance frequency and inductor quality factor. Thermal analysis focuses on realizing reversible transformation by subdividing the switch. This reduces power and current to acceptable levels as well as increases the cooling speed of each sub-via.;This work also includes examination of the electrical/thermal contact between conductive probes and metals using a conductive-AFM system. The current limitations of conductive probes with a focus on mechanical stress, thermal contact resistance, and electromigration are examined. With this understanding of electrical and thermal phenomena at tip point contacts, electrical properties of PC materials are examined. Fabrication details are also presented with respect to unique requirements of test structures for PC materials. At the device level, PC switches are demonstrated in reconfigurable inductors, and are switched between high and low resistance states, showing an off/on resistance ratio of approximately 100x. |
