Research On Theory And Application Of Multi-Mode Micro-Manipulation Based On Ultrasonic Radiation Force Field

With the advantages of miniaturization,function integration,high performance,multi-disciplinarity and mass production ability,Micro Electro-Mechanical System(MEMS)have been gradually applied to different fields of modern society,bringing significant social and economic benefits.Meanwhile,with the development of complex multi-functional and heterogeneous isomeric MEMS,the micro-manipulation technology oriented to MEMS assembly has attracted more and more attention from academic and engineering circles,and has developed a variety of methods and methods.Among them,the non-contact micro-manipulation technology based on the ultrasonic radiation force field not only can avoid the interference of the adhesion force to the manipulation process and the damage or pollution of the manipulative objects to the manipulating objects,but also can adapt to the manipulating objects with different materials and the non-transmission operating environment,synthesize sound field flexibly to achieve multi-mode manipulation and easy to integrate and miniaturize and other non-contact means which are difficult to match,becoming one of the most promising method in the field of rmicro-assembly.However,the current exiting acoustic manipulation techniques are mainly developed for single component or single functions.While the actual micro-assembly involves at least two components at the same time,which is a multi scatterer situation,and the scattering mechanism is more complex than the single scatterer situation.How to calculate the scattering field and the acoustic radiation force acting on the micro-component effectively,there are still many challenges at the theoretical level.At the same time,from the technical point of view,although the single-mode acoustic manipulation methods for single-micro-components are maturing,there is still a lack of good solutions for multi-mode manipulation of single-micro components and effective manipulation of multi-components.Therefore,the current acoustic manipulation technology is still difficult to meet the assembly requirements of the MEMS toward the hybrid development.According to the above background,the research on theory and application of multi-mode micro-manipulation based on ultrasonic radiation force field is carried out in this dissertation,which is supported by National Natural Science Foundation of China "Research on Key Technology of Direct Writing Biological Tissue Based on Acoustic Radiation Force(No.51205351)" and Key Project of Natural Science Foundation of Zhejiang Province"Research on theory and application of automatic 3D micro-assembly technology based on acoustic manipulation(No.21110393)".Based on the analyzing of the research status and development trend of acoustic manipulation-related technologies,the general calculation theory of scattering field and acoustic radiation force of multiple scatterers is established.Moreover,the acoustic manipulation of micro components under the asynchronous control of single acoustic parameters,the acoustic manipulation of micro component pair under the coordinated control of multi acoustic parameters,the synthetic control technique of variable area local sound field oriented to multi-mode acoustic manipulation,the stepless attitude control of non-spherical micro component based on the local synthesis sound field are mainly researched.Thus,a multi-mode acoustic manipulation technology for MEMS assembly is proposed and a set of automatic multi-mode acoustic control system based on machine vision servo is developed,laying the necessary technical foundation for the development of MEMS.The detailed research contents and innovative work are mainly reflected in the following aspects:In chapter one,the application of micro electro-mechanical systems,the generated social and economic benefits,and the significance of micro-manipulation technology research are systematically elaborated.By comprehensively analyzing the research status and development trend of micromanipulation technology at home and abroad,the research objective of micro manipulation technology based on the ultrasonic radiation force field is determined and the problems of the technology existing in the theory,technology,and application and the technical bottlenecks that need to be solved are clarified,which points out the direction for the study of this dissertation.At the same time,the contents of the dissertation and its chapters are also listed.In chapter two,the general theory of calculating the acoustic radiation force acting on multiple scatterers is carried out.On the basis of establishing and solving the wave equation of small amplitude acoustic pressure in the spherical coordinate system,the scattering wave propagation mechanism of spherical scatterers is defined.By expanding the sound field using harmonic function,combining the boundary conditions of scatterers and the addition theorem of harmonic function,the scattering sound field for multiple scatterers in different sound field is computated.At the same time,a general calculation framework of ultrasonic radiation force based on the second-order perturbation theory is established,and the formula for calculating the acoustic radiation force of multiple scatterers in different sound field is deduced,which not only improves the applicability on the form of the incident sound field,but also can be used to calculate the acoustic radiation force of the scatterer with any material by changing the acoustic boundary condition of the scatterer,laying a necessary theoretical basis for follow-up study.In chapter three,the acoustic manipulation of micro components under the asynchronous control of single acoustic parameters is developed.On the basis of building the three-dimensional sound field in half space through the interference superposition of multi oblique incident plane wave,the distribution of the acoustic radiation field acting on the single scatterer is determined and the acoustic capture mechanism of the micro-component is clearly defined.Meanwhile,through the modulation of the acoustic wave amplitude,the micro-components on the solid wall are picked up and released.And by controlling the phase of the acoustic wave,the spatial distribution of the acoustic potential well is dynamically adjusted and the micro components captured in the acoustic potential well is drive to migrate horizontally.Thus,an compound micro manipulation including trapping,picking up,releasing and transporting of the single scatterer in the three-dimensional space are realized.In chapter four,the acoustic manipulation of micro component pair under the coordinated control of multi acoustic parameters is proposed.Basing on the distribution characteristics of the acoustic field in the three-dimensional half-space and combining with the theoretical formula of the acoustic radiation force of multiple scatterers,the acoustic radiation force acting on the micro-components is analyzed.And by adjusting the amplitude and phase parameters of the three incident acoustic waves synchronously,the acoustic field with different sound potential well positions and spacing is dynamically synthesized and then the position and spacing of the component pair are controlled.Meanwhile,an experimental research about controllable adjustment of position and spacing of two spherical scatterers is performed and to verify the feasibility and effectiveness of this technology.In chapter five,the synthetic control technique of variable area local sound field oriented to multi-mode acoustic manipulation is proposed.By realizing the theoretical expression of the local synthesis target sound field and combining the discrete aperture model and the mode matching technology,the acoustic pressure of the control point located on the boundary of the synthesis sound field region is acquired.Then,by using the inverse filtering method,the excitation signals of the array sound source,which can synthesize variable region sound field in the manipulating space,are obtained.Moreover,a multi-region local sound field synthesis technique is further developed by utilizing the relationship between the range of synthetic region and the number of truncated orders.Finally,the simulation and experimental research are developed to verify the feasibility and effectiveness of this technology.In chapter six,the stepless attitude control of non-spherical micro component based on the local synthesis sound field is proposed.Firstly,by using the multipoint support harmonic function,the relationship between the expansion coefficient of the incident sound field and the scattering sound field and the scattering coefficient of scatterer wave on the surface of the scatterer are established.And then the T matrix characterizing the relationship between the incident and scattered sound fields can be determined,which can realize the fast calculation of the acoustic radiation torque acting on the highly non-spherical scatterer.Secondly,using the local acoustic field synthesis technique mentioned above,a strongly constrained and high matching local target sound field is obtained and its non-radius rotation is achieved by adopting the backstepping principle.Finally,the stepless regulation technology of non-spherical scatterers is verified by simulation,and a series of experimental studies are carried out adopting silica rods to vertify the effectiveness of this technology.In chapter seven,the research of automatic multi-mode acoustic manipulation technology based on machine vision servo is carried out.On the basis of determining the overall scheme of the system,the high frame rate CMOS camera system based on CameraLink,a high speed image acquisition and parallel processing card,a PXI-based multi-channel programmable signal generation module,a multi-channel linear power amplification module and an array sound source module and so on are developed,and an automatic multi-mode acoustic manipulation experiment system based on machine vision servo is developed by adopting the virtual instrument architecture.Meanwhile,the practical experiments are performed to verify the feasibility and effectiveness of the theory and technology proposed in this dissertationIn chapter eight,the research achievements and the innovations of this dissertation are summarized,and the future works are also forecasted.