Design Of The Levitation And Transmisson Experimental Platform Supported By Near Field Ultrasonic Wave And Research On It Characteristic

Near field ultrasonic levitation technology is a new development in the field of non-contact levitation technology,and it is widely used in biology,chemistry,rotating machinery and micro electro mechanical systems.As the traditional contact transmission platform in the round-trip times transport of semiconductor chip containing important information,the surface of a semiconductor chip can be easily damaged and cause a loss of information,the traditional contact transmission platform can't meet the needs of people to improve the level of information technology.Therefore,the development of near field ultrasonic levitation technology is very important in the field of MEMS.In this paper,the size and shape of the important components of the near-field ultrasonic suspension system are designed by theoretical model calculation and finite element analysis.The experiments which find ways to improve the near field suspension characteristics are conducted after completion of the suspension experiment platform.Then,the design method and characteristics of the near field ultrasonic transmission system are studied on the basis of experimental platform.The main contents are as follows:Select the version of ultrasonic generator according to the operating frequency and power input required by the system.Introduce the classification of ultrasonic transducer.The size of the sandwich transducer is calculated by the dynamic equation,the velocity equation and the boundary conditions.The calculation models of different types of ultrasonic horn are studied,and to determine the type and size of the horn in experiment.Select the drive disc as the ultrasonic tool head.Determine the size of drive disc by reference to the calculation model of the free vibration disk.The design of the components is assembled into a suspension system physical model,and the test rig is verified by finite element analysis.Build experimental platform of near field ultrasonic levitation.Amplitudes of different types of exciting disks are obtained by adjusting the output parameters of ultrasonic generator.The mode is obtained by measuring the amplitudes of multiple point,the results are similar to those of finite element analysis.In the study of suspension height characteristics,a calculation model of near field ultrasonic suspension height considering inertial force is proposed,the equation is solved by the finite difference method,which is good agreement with the experimental results.The motion trajectory of the excitation disc is identified by LABVIEW.The results show that the stability of the drive plate with trapezoidal cross section is better than that of the rectangular cross section.The construction of near field ultrasonic transmission system is completed on the basis of the previous research.A suitable matching circuit is designed to be connected to the absorber.The basic characteristics of transmission are studied by measuring the transmission time and height of suspended plate.It was found that when the bottom surface of the suspension plate is engraved with the groove type,which is perpendicular to the propagation direction of traveling wave,the transmission characteristics were superior to floating plate with same size and no groove.The above research provides a good experimental and theoretical basis for the development of near-field ultrasound technology in practical application.