Piezoelectric Device Structure Design And Principle Analysis For Ultrasonic Manipulating The Micro/Nano Material

Based on the previous research results and existed defects about the acoustic manipulation ofmicro/nano material, we have put forward novel acoustic manipulation devices. In order tocircumvent the lack that the structure of the ultrasonic transducer with wedged aluminum substrate,which drived micro particles to rotate, was complex and the manipulation stability of using theultrasonic transducer to rotate micro particles, we have proposed a new ultrasonic transducer with barcopper substrate. We have explored the principle of driving micro particles to rotate by the ultrasonictransducer with bar copper substrate by experiment, used the finite element method analysis softwareto verify the principle investigated by experiment, and measured the characteristics of micro particlesmanipulation. Experimental results indicated that the ultrasonic transducer with bar copper substratecould rotate micro particles effectively, and the driving principle was that the elliptical motion of masspoint caused by circumferential rotary traveling wave makes friction between substrate and microparticles to rotate them. Moreover, the finite element analysis and calculation confirmed the principleand obtained that structure damping ratio could affect the speed of circumferential rotary travelingwave. Aiming at the shortage of contact manipulation on nanowires by L-shaped ultrasonic microprobe, we have proposed hooked ultrasonic needle to manipulate nanowires in noncontact way. Wehave explored the principle of manipulating nanowires by hooked ultrasonic needle by experiment,estimated the order of magnitudes of driving force and torque used to manipulate nanowires, andmeasured the characteristics of nanowires manipulation. Experimental results demonstrated that thehooked ultrasonic needle could manipulate nanowires effectively, and the driving force or torquederived from the acoustic viscous force caused by acoustic streaming. Theoretical calculation resultsshowed that the driving force and torque on a nanowire were estimated to have the order ofmagnitudes of10-14N and10-19Nm. Acoustic devices and theory research results on micro/nanomaterial manipulation have important potential application value on micro/nano mechanicalmanufacture system field.