Research Of A Hollow Cylinder-shaped Ultrasonic Device For Micro Manipulation

Micro/nano manipulation technology is a technology that drives micro/nano material to realize micro/nano object's controllable rotation,aggregation,separation,clearance and transportation.Acoustic manipulation uses acoustic physical effects to manipulate micro and nano materials.Acoustic manipulation has many advantages,such as low cost,no choice of controlled object,no heat damage and so on.It has a very broad prospect in engineering application.This article is based on the research of PI-shaped piezoelectric ultrasonic transducer.A piezoelectric hollow cylinder ultrasonic control device is proposed,which realizes ultrasonic manipulation of micro particles and enriches the way of ultrasonic manipulation.The main research work is as follows:The existing methods and their advantages and disadvantages of micro nano material manipulation are introduced.The research status of ultrasonic micro nano manipulation is introduced in detail,and the research purpose,research route and innovation point of this subject are also elaborated.Based on experimental and theoretical verification methods,the characteristics and principles of Micro Ring aggregation and movement on silicon substrate driven by hollow cylindrical ultrasonic manipulating device are studied.When the hollow cylinder side wall vibrates at high frequency,the micro particles are gathered,and they work in the bending mode.A circular acoustic radiation force field is generated near the lower side of the side wall,which drives the particles to move to the side wall of the cylinder to form ring concentration.The cause of acoustic radiation force is studied,and the acoustic radiation force distribution pattern between cylindrical transducer and substrate is simulated by finite element software COMSOL Multiphysics,which is consistent with the observed particle aggregation phenomenon.At the same time,the force analysis of the surface particles on the substrate is carried out to verify the accuracy of the experimental results.Calculation shows that the substrate surface of a single particle driven by force magnitude for10^-8N.Acoustic radiation force plays a major role in the manipulation of particles.