| With the rapid development of modern industrial technology,high-performance precision drive devices play an extremely important role in high-end manufacturing fields such as microelectronics,defense science and technology,and aerospace.The development of precision drive devices with large stroke and high precision characteristics is of great significance to improve the development technology level of high-end manufacturing equipment in China.Firstly,based on the design of the macro-motion structure of the coaxial integrated macro-micro composite actuator,the magnetic circuit and magnetic field characteristics of the macro-motion structure are analyzed.Then,the multi-field coupling model of macro voice coil motor is established,and the positioning motion control strategy is planned.Then,the design scheme of the control system is proposed,and the control system construction and program debugging are completed.Finally,the driving power and positioning test platform of macro voice coil motor are built,and the output performance is tested.The main research contents and conclusions are as follows:1)The structure design of the macro voice coil motor with coaxial integrated macro-micro composite actuator was completed.The magnetic flux distribution and internal magnetic field distribution of the axial and radial sections of the macro voice coil motor were analyzed.The results show that the magnetic flux distribution at the air gap of the macro voice coil motor is uniform on the whole,and the input current and output force are linear.2)The magnetic-mechanical-electrical multi-field coupling model of macro voice coil motor is established,and the influence of electromechanical and electrical time constants on the motor control model is analyzed.Based on the model of current source,current PI controller,feed-forward compensator and PID controller,the control block diagram of the overall control system of the macro voice coil motor is built.The feed-forward-feedback closed-loop control strategy for large stroke positioning of macro-motor voice coil motor is planned by using T-type velocity curve displacement control algorithm.3)The hardware of the control system is designed,including power supply,communication and download circuit of DSP and FPGA,digital-analog and analog-to-digital conversion circuit,main circuit of bidirectional programmable current source,current mode switching and sampling circuit.The software part of the control system is developed,including the main program of DSP and FPGA control,the serial communication and analysis program,the digital-analog and analog-digital conversion program of FPGA,the displacement planning program of T-shaped velocity curve,the feedforward compensation PID program and the current compensation PI program.4)The current output performance of the bidirectional programmable current source is tested.The experimental results are as follows:under the two modes of only positive current and continuous output of positive and negative current,0-5 A and-5 A-5 A are output respectively,and the current output nolinearity reaches 0.0032 and 0.0050 respectively,and the average current output precision is less than 0.45%and 0.55%respectively.The motion positioning performance of the macro voice coil motor is tested.The experimental results show that the maximum positioning stroke of the macro voice coil motor is 48 mm,the positioning error is less than 2.5 μm,and the actual displacement curve and the set displacement curve follow well.Fig[108]table[4]reference[73]. |
