Control Design Of Macro-micro Stage

This paper combined with the China Postdoctoral Fund Project——Gold bump shear broken wire high-speed coplanar Nonlinear Control Method,uses the high-speed/high-precision macro/micro-positioning platform which is developed by Robotics Institute Harbin Institute of Technology as research object and the system identification, modern control theory, intelligent control theory to explore and study the structure and dynamics according to the system frequency response identification using the establishment of macro / micro-positioning platform method of mathematical model to design a nano-positioning accuracy and response speed of microseconds macro/ micro-positioning platform for control systems.In this paper we identify the dynamic model of Macro-micro stage by an improved Levy method, which is based on the Levy method but keeping the index function in its original form and an incremental iterative algorithm is used. The improved Levy method has rather good astringency and the accuracy of parameter estimation is much improved compared with the classical Levy method.In this paper we choose a hybrid control of macro-positioning platform and micro-positioning platform as the control strategy, which introduce the model reference output feedback control to macro positioning stage, and the system is not need to be all state observable, while we can achieve the goal of precise tracking by output information with the parameters of plant. Micro positioning stage uses the positioning error of macro positioning stage as reference input, opting inverse control approach of dynamic compensator and DRFNN combined. Compensator optimizes the closed-loop pole locations of linear part in the system, so that the system performance advanced. In order to improve system control precision, we choose DRFNN to offset the hysteresis nonlinearity of PZT. In this thesis, we do simulation research based on macro-micro dual-drive stage researched and developed by robot research institute of Harbin institute of technology. As the result indicated,the controller can improve the dynamic performance of macro-micro positioning stage with shorter settling time, less overshoot and less tracking error.