Simulation And Fabrication Research On InP Based Ring Laser

Micro-ring resonator is considered to be the basic component of optical integrated circuit and optical computer in the future. They can be implemented for such diverse applications such as lasers, amplifiers,sensors, optical channel dropping filters (OCDFs), optical add/drop multiplexers (OADMs), switches, routers, logic gates, optical-memory and optical delay-line. The Theory of foundations in micro-ring is involved with optical filtering, bistablility theory of InP based microring laser, which is mainly discussed in this dissertation. The research on device simulation, modeling and optimization is explained in detail. Furthermore, the fabrication of micro-ring filter which is based on optical filtering and bistability is carried out. The innovation points in this dissertation can be concluded as follows:1 The numeric finite element theory analysis is presented for two basic problem of silicon and InP based microring resonator, which are single mode condition and coupling between waveguides. Such a research combine the couping parameter of transfer matrix with the specific geometry structure of SOI and InP rig waveguide. The defect of transfer matrix method is remedied by the research result.2 In the aspect of filtering theory, the Spice based circuit model is presented and the application involved in double-ring and multi-ring resonator design is discussed as examples. A System design method of micro-ring based optical filter is provided. Using this method, coupling parameter and passing parameter of series micro-ring resonator are calculated.so a full solution of optical filter design flow from filter charactristics to device geometry is provided.3 In the aspect of bibistablility theory,using the methods of the modern nonlinear dynamics, the stability and bifuraction behavior in a semiconductor ring laser are analyzed and calculated。The calculated results show that the change of backscatter parameter can result different dynamics behaviors including bifurcation and chaos in different operation region. Furthermore the physical reason of such complex nonlinear dynamics behavior is given.4 Finite-difference time-domain method with perfectly matched layer boundary and period boundary is researched. Moreover, FDTD mothod is used in the design of micro-ring resonator. Single, double and multi rings filtering characteristics and infinite long period structure are analyzed.5 In the aspect of device fabrication, InAlGaAs-InP based multi-quantum well ridge waveguide micro-ring laser sample is developed. The process is involved advanced inductive coupled plasma etch technology and Polyimide smoothness technology. Optical lasering is observed with positive-bias ring stucture, and then optical signal is outputed from the line waveguide near the micro-ring. The measurement of electron microscope and atomic force microscope show good performance. The comb filter characteristic and bistablility charcteristis is tested. The result approve the effectivity of filtering and bistability theory.