Studies On Thin Film Sensors For The Whole Ultra-high Pressure Range

Manganin gauge and ytterbium gauge are special sensors used to measure ultra-high pressure generated by shock waves. Manganin sensor has the highest measurement range, which can reach to 60GPa, among all existing pressure sensors. Ytterbium sensor is suitable for lower range of ultra-high pressure, the measurement range from several MPa to 4GPa. In the national defence engineering application, the sensors need meeting the requirement of quick measurement and insulation under high pressure. In this dissertation, new kinds of thin film manganin array sensors and thin film ytterbium sensors were fabricated by adopting structural optimization design, new sensing and package materials, and technical parameter rectification and perfect experimental results were available by ultra-high pressure measurement. The main conclusions and original results are summarized as follows.1. 2×2 array thin film manganin sensors were fabricated on the 99% alumina substrate for the first time, on which four sensors were symmetrical. Sensing film was located in the range of shock wave. Output of four sensors had good consistency by two-light gas gun loading experiments. No high-pressure induced shunt effect is present, indicating the high accuracy and reliability of manganin thin film sensor arrays.2. Ytterbium target was fabricated by wire cutting EDM. Inferior ductibility of ytterbium is easy to rupture during the course of rolling, furthermore, its chemical character is active, so rolling and power metallurgy method can't obtain ytterbium target. The method fabricating ytterbium target by us has not been reported.3. The film ytterbium sensors were fabricated by DC magnetism sputtering method for the first time. By one-light gas gun loading...