Ultra-high Pressure Sensor Array Of Manganese Copper Film

Manganin gauge is a kind of special sensor which is mainly used to measure the ultra-high pressures generated by shock waves. It has the highest measurement range, which can reach to 50 GPa, among all existing pressure sensors. To meet the demand of special engineering, the measurement range of the gauge must be extended and the rise time must be decreased. In this dissertation, a new kind of thin film manganin gauge was fabricated by adopting new structure, new sensing and packaging materials, and new fabrication technique. The main conclusions and original results are summarized as follows. The manganin ultra-high pressure sensors for gas gun were made by two-step thin film techniques, namely, manganin thin films were first deposited by magnetron sputtering on fused silica substrates, and then covered by a layer of SiO2 thin films by electron beam evaporation. Consequently, the manganin sensing elements were 'cleanly' encapsulated in inorganic solid matrix and the high-pressure shunt effect was eliminated radically. The design of manganin film and copper film were etched by the first time. The etched design can avoid side diffraction effect which is compared with mask deposition method. It also can give accurate figure.Based on impedance match method of "back configuration", the measurement range of the gauges can be extended to 100 GPa and above. The pressure in Al target is 51.68GPa and SiO2 is 35.396 GPa. The rise time is 30 ns, The delay time is 400 ns. According to this data, This kind of sensor can measure higher pressure and didn't have the high-pressure shunt effect.