Based On Mems Micro Actuator Disc Wing Flow Control

Microactuators are critical parts for MEMS to fulfill the physical functions. The research about microactuators is one of the hotspots in the MEMS research fields. Self-adapting structure for the aerodynamic control, which is arrayed by a lot of the same microactuators, has become the important issue in the AERO-MEMS field. Micro electromagnetic actuator array for aerodynamic control of the disc-wing has been explored in this paper. According to the theory of boundary layer control, the aerodynamics of the disc-wing is investigated, the array and act plan of the microactuators is designed. The structure and process of the micro electromagnetic designed, the design by the FEA (finite element analysis) and CFD ( computational fluid dynamics ) simulations is validated. The results show that the aerodynamic control of the disc-wing by microactuators is feasible. The main content of this thesis includes:1. The disc-wing aerodynamic in the condition of low Reynolds number is explored . The influence of aerofoil parameter is analyzed and the separate position of the disc-wing's boundary layer is found.2. Micro cantilever electromagnetic actuator is described. Numerical models about the magnetic force and displacement of the beam are established according to the electromagnetics principle.3. Based on the numerical model, the relation between the displacement of the beam and actuator parameters is described. Then the finite element analysis is used to validate the design.4. The MEMS microfabrication process is introduced. The corresponding process of micro electromagnetic actuator is designed.5. The theory of aerodynamic control of the disc-wing by microactuators is described. Then CFD simulations are carried out about micro electromagnetic actuator's influence on vortex and pressure distribution onthe upper surface of disc-wing. The results show that its control capability is acceptable.