Research On Flexible Micro Operation Method Based On Modular Multi-finger Actuator

With the development of natural science and engineering technology, micro nano technology has been widely used in aviation, aerospace, biology, medicine, national defense and other fields. As an important part of micro nano technology, the micro actuator is a hot research topic in domestic and foreign scholars. Miniaturization is an important trend in the development of micro actuator, but it also brings the high cost and long production cycle. In the development of the micro actuator, the reliability is not high, and the key parameters are difficult to verify.Based on the difficulties in the development of micro manipulation tools and the verification of micro tools, this paper proposes a flexible micro operation method with modular multi-end actuator. In the micro operation mechanism and the flexible operation method, the influence of the adhesion force on the micro operation process and the flexible operation method have been researched. Based on the control of the adhesion force, the model of picking up and releasing of the single finger, double fingers and the three fingers had been established, and the effect of the adhesion force on the different operation was analyzed. According to the requirements of various micro object manipulation tasks, the design of multi finger flexible operation method was completed. At the same time, based on the micro adhesive force, the flexible micro operation method had been extended.In the aspects of designing multi-finger flexible operation tool and realization method, an independent unit which has a single drive and a replaceable end actuator has been performed. Modular assembly is designed to realize the soft switching among multi operating mode. According to the calculation and selection of the flexible hinge, the key parameters of the single finger structure were determined. The independent single finger unit uses the lever amplification mechanism, which has a displacement output with higher magnification. The chosen piezoelectric ceramic actuator is to realize the high-precision displacement output of single finger. Simulation and parameter optimization of single finger were carried out by the method of finite element analysis. Aiming at the adjustment difficulties of multi-finger micro operating actuator, the scheme of designing micro-motion and multi-finger flexible operating tools has come up, which can improve the precision and easy operability of the system.In the aspect of experimental research, the flexible micro operation system based on the modular multi-finger actuator has been established. Property test of the singer finger was finished and the calibration of the force sensor was realized using the single finger. In the experiment of flexible micro operation, the flexible operating mode of one, two and three fingers was verified respectively and realized the flexible picking up of various objects and modes. What’s more, the multi-finger end actuator has the ability of completing the flexible operating tasks and high-precision operations. Finally, aiming at the expandable property of flexible micro operating method, the verification of microsphere self-adhesive assembly and microsphere microscopic imaging technology has been realized.Above all, the flexible micro operating method based on modular multi-finger end actuator proposed in this paper, not only meet the operating requirement of multi-type and large-size range micro objects. Its flexible property also offers a realizing path for the key materials selection and parameter verification of micro end actuator. This method will shorten the verification period of miniaturized tools and reduce the designing and manufacturing costs.