Design Of An In-plane Piezoelectric Micro-actuator Based On PZT

An in-plane piezoelectric micro-actuator based on PZT is a micro-divice which can produce deformation displacement output in plane which the micro drive is located in.With a small size,fast response,the output force and other advantages,it has important application value in the field of high-performance drivers and sensors.This subject designed an in-plane piezoelectric micro-actuator based on PZT-4.With a matrix of Si crystal,the micro-actuator is drived by inverse piezoelectric effect.Piezoelectric driven principle and the significance of piezoelectric cantilever beam as a drive components are discussed.Combined with the amplification mechanism,the micro-actuator deformation mechanism is described.In the process of establishing the micro-actuator mechanics model,the micro-drive is simplified as a beam and a bevel beam for analysis.The relationship between the deformation output of the micro-drive and the structural parameters is obtained by using the force and the moment as the medium of contacting beam and the bevel beam,and the magnitudes of the force and the moment are obtained by the displacement relation.By modifying the displacement relation,the change of the result with different structural parameters is obtained under different displacement relations.And the theory of the error was described.The finite element simulation is used to verify the theoretical analysis model.At the same time,the influence of the key parameters of the micro-drive on the deformation output is given,and the theoretical analysis model is modified according to the results of the finite element simulation.The results of the theoretical model and the finite element model are more anastomosis.Both show that within a certain range,the required deformation results with the angle and the bevel beam width decreases,along with the voltage,the beam length and the beam width rise.The micro-actuator was prepared with PNZT as the piezoelectric material.The preparation process of micro-actuator,the preparation of LNO oxide film and PNZT thin film,the micro-actuator deformation test and so on are introduced.It is shown that the deformation displacement of the PNZT micro-driver increases as the voltage increases,thus verifying the correctness of the principle of the designed driver.