Mems Isotope Micro-battery Energy Conversion Modeling And Performance Analysis

As the development of MEMS (Micro Electro Mechanical System) investigation, a self-powered and long time stable working microsystem is expected, which integrates various micro components and micropower component. Thus, the research of micropower with advantage in micrbfabrication process compatibility, integration, stability, and lifetime is needed. Compared with chemical fuels and solar cells, betavoltaic microbattery using radioisotope thin film has been researched toward a solution of micropower supply with advantages in size, weight and endurance. In view of the characteristic of radioisotope microbattery based on betavoltaic effect, betavoltaic microbattery that has long lifetime, no need for fuel storage, and is easily integrated on-chip can reach the power supply needs of MEMS.In this thesis, the model of a betavoltaic energy converter was designed and some numerical simulations were made. In addition, several key technologies about the betavoltaic microbattery design were explored.Firstly, The theoretical model of radioisotope microbattery energy converter based on betavoltaic effect and the circuit model of microbattery were constructed respectively, and the calculation formulas of microbattery were concluded. It can be concluded that doping concentrations, width of depletion region, junction depth are crucial parameters that affect performance of microbattery.Secondly, the effects on the mirobattery output characteristic of doping concentrations, width of depletion region, junction depth were analyzed. In the analysis, the optimal values of the above parameters were numerically solved.Thirdly, the output characteristic, temperature characteristic and radioisotope radiation characteristic were analyzed. In the analysis, the optimal values of some cucial parameters were numerically solved.Finally, the corresponding microfabrication process and layouts of some kinds of...