Design Of High-Precision Two-Dimensional Calibration Platform For Detector Array

Precision motion platforms are widely used in semiconductor materials,aerospace,optical adjustment,bioengineering,mechanical manufacturing,medicine,precision industrial manufacturing,and other fields.With the development and application of precision motion platform technology,the level of science and technology has been continuously improved.Therefore,precision motion platform technology has important research significance and theoretical value.In this study,a set of high-precision two-dimensional calibration platform was designed to address the difficulties in detector array calibration.The specific research work is as follows:(1)The optical calibration system for detector arrays is studied,the calibration process and principle are analyzed,and the design requirements and functions of a two-dimensional calibration platform are proposed.The mechanical structure and control system of the platform were designed,and the key components of the platform were selected to produce a two-dimensional calibration platform.(2)A closed-loop displacement control system using a single chip microcomputer to control a stepper motor and encoder is designed.The PIC33FJ128GP710 A single chip microcomputer is used as the control core,and the peripheral circuit is designed.A control handle using a PIC16F883 single chip microcomputer as the core is designed.Finally,the circuit diagram and PCB diagram are designed,and the control system board and the control handle are produced.(3)A lower computer software control system program written in C language is designed,using modular software design principles to design the main program and subroutine tasks,improving the resource utilization and running speed of the system.A PC software program written in C# language is designed to provide human-computer interaction functions.(4)The control algorithm is studied,using point-by-point comparison linear interpolation algorithm and incremental PID control algorithm to improve the control positioning accuracy of the two-dimensional platform.(5)The error of the two-dimensional calibration platform is analyzed,and a high-precision grating ruler is used to calibrate the platform.An error compensation model for the positive and negative movement directions of the X and Y axes is established to improve the repetitive positioning accuracy of the system.Establish a detector array calibration experimental platform,and conduct comprehensive testing on the two-dimensional calibration platform,verifying the feasibility of the platform.The research results show that after error compensation,the positioning accuracy of the platform reaches-11-13 um,meeting the design requirements of the platform.At the same time,the calibration experiment results show that the coefficient of variation(CV)of ten single point calibration data is 0.13%,and the average measurement error of the entire target calibration is 1.65%,fully meeting the calibration requirements.It has the characteristics of fast calibration speed,high accuracy,and low cost.