Study On Micro Alcohol Sensor Based On Semiconductor Oxide

Alcohol is a volatile,colorless,transparent organic compound that has wide applications in the chemical industry,food industry,pharmaceutical research and development,and traffic safety fields.To accurately detect the concentration of alcohol gas in the environment,researchers are committed to the development of high-performance alcohol gas sensors.On the one hand,with the development of microelectronics and micro-nano processing technology,traditional gas sensors based on ceramic tubes have a larger volume and higher power consumption,which no longer meets the market demand.On the other hand,with the advancement of materials science,gas sensors based on semiconductor oxides have gradually emerged.These sensors have been widely studied due to their advantages of stable electrochemical performance,non-toxic and harmless,low cost,and high performance.Among numerous semiconductor oxide materials,Ti O₂ is an N-type wide bandgap semiconductor metal oxide with advantages such as large bandgap width,small grain size,high stability,and easy synthesis and preparation.However,the preparation methods of Ti O₂ nanomaterials currently used in research have poor compatibility with micro nano processing processes.In this paper,Ti O₂ nanopillar materials were prepared by grazing angle deposition technique in electron beam evaporation deposition.After high-temperature annealing treatment,its application value in ethanol gas sensing materials was studied.The specific content of this article is as follows:Firstly,a brief introduction is given to the research on gas sensors,and then the current status of research and development on the gas sensing characteristics of Ti O₂ materials is elaborated.Secondly,a detailed description was given of the crystal structure of Ti O₂,and the possible effects of each crystal structure on its gas sensing performance were analyzed.Several synthesis methods of Ti O₂ nanomaterials were introduced,and the advantages and disadvantages of each method were compared.Then,the classification and performance indicators of gas sensors were also introduced.Finally,nano thin films and nano column materials were prepared using electron beam evaporation deposition method and grazing angle deposition technology.The two materials were annealed using a muffle furnace,and gas sensing performance tests were conducted on ethanol gas of different concentrations.The test results show that after annealing at 600℃for 1h,both materials are crystallized into single crystal anatase phase.The optimal operating temperature of Ti O₂nanofilm materials is 320℃,and the sensitivity to ethanol gas with a concentration of300 ppm is 12.5;The optimal working temperature of Ti O₂ nanopillar material is 300℃,and the maximum response to ethanol gas at a concentration of 300ppm is 34.8.The response curve shows that the Ti O₂ nanofilm material shows a trend of gradually increasing over time,while the Ti O₂ nanopillar material shows a phenomenon of reaching its maximum value and then gradually decreasing.The fastest response time and recovery time of Ti O₂ nanofilm materials are 19 seconds and 39 seconds,respectively,while the fastest response time and recovery time of Ti O₂ nanopillar materials are 17 seconds and32 seconds.The research results of this article indicate that Ti O₂ nanofilm materials have good gas sensing performance for ethanol gas,while Ti O₂ nanopillar materials have significant practical application value due to the increase in oxygen vacancies caused by their high specific surface area,which greatly improves their working temperature,gas sensing response sensitivity,response time,and recovery time.