Research On Error Calibration Technology Based On Multi-channel RF Device Test System

As one of the core components of wireless communication systems,precise testing of RF MEMS devices’ performance indicators is a key step in technological development.As a necessary test parameter for the performance indicators of radio frequency and microwave devices,the S parameter can visually demonstrate the signal transmission performance of radio frequency and microwave devices.With the development of high-frequency test circuit technology,the requirements for measurement accuracy of RF MEMS devices are also continuously improving.The multi-channel RF device testing system developed in this project utilizes a conductive film(ACF)fixture test board,combined with a multi-channel extended array module,to achieve solderless multi-channel fast gating testing of RF MEMS devices in chip packaging.Then,combined with the designed fixture calibrator and calibration software,the test data is de embedded and calibrated to ensure that the test data of RF MEMS devices meet the index requirements.The article will discuss from the following aspects.Firstly,based on the vector network analyzer and the principle of multi port testing,the channel expansion module of the multi channel RF device testing system is designed and completed;Based on the theory of microwave transmission,a conductive film clamp test board and clamp calibrator for RF single pole four throw switch HMC641ALP4 E with a frequency range of 0.1 GHz to 20 GHz were developed.Secondly,by analyzing the extended channel error model and deriving the error correction matrix,the link calibration of the extended channel is realized;The data calibration of the S parameter of the single pole four throw switch is realized by deriving a TRL calibration algorithm;Based on the algorithm,the TRL calibration software is written,and the vector network analysis module is invoked by the host computer to collect data.The measured data is imported into the calibration software to calibrate the data.Finally,through the actual measurement verification of the single pole four throw switch and comparison of the measured data before and after calibration,the S21 data at the 20 GHz frequency point was-3.16 d B,an increase of 4.84 d B,and the S11 data at the highest point was-8.647 d B,which is superior to the official website S11 data.The S parameter indicators of RF MEMS devices tested by a multi-channel RF device testing system can meet the expected goals,verifying the feasibility of this research technology.The designed RF MEMS device fixture test board and calibration technology have extremely important application prospects in the field of RF MEMS device testing.