| Due to the advantages of high flux,long penetration depth,high detection limits and the available of multiple in-situ analysis,the synchrotron X-ray nanoprobe is widely used in many scientific fields such as materials science,environmental science,life science,geology,physical chemistry,astronomy and archaeology.The stability of the nanofocusing optics is the most important factor affecting the focusing spot size,and therefore high precision and stability are required for the manipulator of nanofocusing optics.Taking the advantages of frictionless,gapless,continuous motion and without lubricant,the flexure hinges are widely used in the design of the attitude adjustment mechanism in nanoprobes in the world.The purpose of this paper is to systematically acquire the mechanical design and analysis methods of the high precision flexure hinge based on the previous beamline experiences,explore the development of a new flexure hinge manufacturing method,fill in the technical gaps in domestic,and realize the independent research and development of the high precision and high stability flexure hinge mechanism.Based on the basic configuration of circular hinge,this paper analyzes the motion characteristics of this hinge configuration by using the elastic theory.The correspondence between force input and displacement of the flexure hinge mechanism of parallel linkage with different number of hinge pairs is analyzed by means of elastic theory,pseudo-rigid body model and finite element analysis method.And the effects of parameters such as the number of hinge pairs n,cutting radius R_f,connecting rod length L,minimum hinge thickness t,and hinge thickness w are discussed.Under different driving force conditions,the difference between the elastic mechanical analysis and finite element calculation is about 2%,between the pseudo-rigid body model and finite element calculation is about 8%,respectively.The theoretical analysis is consistent with the finite element simulation results.The technical parameters of the designed hinge mechanism such as motion stroke,load,structural strength,accuracy and stability are verified by the finite element simulation analysis method.In this paper,multiple parallel-link flexure hinges are further selected to design the one-dimensional linear motion flexure hinge displacement mechanism,and the finite element analysis is executed.The finite element analysis results show that the unidirectional output displacement of the displacement mechanism can reach 142.3μm under the force of 12 N and 118.5μm under the force of 10 N,which meets the travel demand of±100μm.The maximum local stress of the hinge is about 411.8 MPa,which is less than the allowable stress of 803.3 MPa for 17-7PH stainless steel material.The first-order frequency of the mechanism is 191.01 Hz,which is higher than the application requirement of 100 Hz.This paper is the first time to attempt to use metal 3D printing to realize the manufacturing of circular flexure hinge structure.According to the avaliable 3D printing method in civil,the Selective laser melting(SLM)technology is selected to explore the manufacturing method of ultra-thin-walled structures.The flexible hinge sheet structure is successfully developed,an one-dimensional linear linear nano-motion mechanism prototype is assembled and tested.The test results show that the mechanism achieves 0.2 mm motion stroke and±1.7 nm(RMS)position stability with two pairs of flexible hinges with n=6.It is verified that the flexure hinge mechanism manufactured by the 3D printing can meet the technical requirements of high precision and high stability of the Kirkpatrick-Baez nano-focusing mirror adjustment mechanism in terms of travel and stability.Through the research of this paper,we have systematically mastered the design and optimization analysis method of flexible hinge precision adjustment mechanism,developed the hinge manufacuring method of metal 3D printing.The high precision and high stability flexure hinge mechanism is developed independently. |
