Research On Vibration Characteristics Of Ring Resonant Gyroscope

In this thesis,the vibration characteristics of MEMS(Micro-Electro-Mechanical System)ring resonant gyroscope system are focused on.This article focuses on the dynamics of MEMS(Micro-Electro-Mechanical System)ring resonant gyroscope system.MEMS ring resonant gyroscope is a vibrating angular velocity sensor,which has been widely used in the Internet of Things,inertial navigation system,consumer electronics products and other fields.The advantages including the low power consumption and the small size have attracted a wide spread attention.In order to improve the working efficiency of the gyroscope,it is necessary to increase its measurement accuracy.The research content of this thesis mainly includes:First,the mathematical model of the MEMS ring resonant gyroscope system is established.The Hamilton principle is used to model the MEMS ring structure.When modeling,three types of damping are considered,including the structural damping,the anchor damping,and the temperature field.By analyzing the changes caused by the thermal expansion effect,the influence of the temperature field on the vibration characteristics of the ring is obtained.To analyze the influence of anchor point damping,assuming that there are 8symmetrical points on the inner side of the ring acted by the anchor point damping.Then,the natural frequencies of the ring resonant gyroscope system are calculated by the vibration modal analysis method,and the effects of the temperature field and the anchor damping on the natural frequency are discussed separately.And the variation laws and features of natural frequency are analyzed when the temperature increases.The research results show that the impact of anchor point damping on the natural frequency of the system is not obvious,which is similar to the existing results;Finally,the traveling wave method is used to solve the system model,the changes of each mode of the ring are analyzed from the perspective of elastic waves.Based on the numerical simulation experiment,when the different kinds of damping are considered separately,the influence of angular velocity and temperature on the vibration modes of ring are investigated.The conclusions obtained will help to have a deeper understanding of the vibration characteristics of the MEMS ring resonant gyroscope system,and provide help for improving the design accuracy of the ring resonant gyroscope.