Design Of 6?18GHz Active Phase Shifter Based On 40nm CMOS Process

With the development of modern social communication technology,people have carried out further research on phased array technology and applications in order to cope with more complex and diverse scenarios in the future.The civilian application of phased array systems has become a trend,and people have gradually increased the comprehensive requirements for phased array products in terms of performance,cost,and reliability.With the development of silicon-based semiconductor technology recently,it has become possible to design millimeterwave integrated circuits with cheaper and more reliable CMOS technology.Although CMOS technology has no advantages in output power and noise performance,phased array technology can significantly improve the signal-to-noise ratio and sensitivity of wireless communication systems,thereby reducing the power and noise requirements of individual devices in the system.This makes the research of active phased array based on CMOS technology of great significance.As a key module in the phased array system,phase shifters have a good research prospect.Based on the classification and working principle of phase shifters,this paper designs a6 bit active phase shifter that works at 6?18GHz based on 40 nm CMOS process.The phase shifter adopts a vector modulation structure,including an active input balun,a quadrature signal generating circuit,a vector adder,an active output balun,a compensation amplifier,and an amplitude control circuit module.Active input balun and vector adder modules use parallel peaking technology to improve broadband characteristics;quadrature signal generation circuit adopts RC poly phase filter structure to obtain good broadband characteristics;the amplitude control circuit adopts the method of increasing the control bit to improve the current accuracy,thereby reducing the phase shift error of the phase shifter;this design uses a gain compensation amplifier to compensate the insertion loss of the quadrature signal generating circuit,meanwhile employs a temperature compensation circuit to compensate changes in the overall circuit gain at different temperatures.Circuit design and analysis,pre-simulation results,layout design and optimization,and road-field hybrid simulation results are presented in this paper.The mixed simulation results of the road and field show that the designed active phase shifter has a working frequency range of 6?18GHz at full temperature(-40??85?),the input matching S11 is less than-11.43 d B,and the output matching S22 is less than-12.25 d B.The phase mean square error is less than 2.34°,the gain mean square error is less than 0.35 d B,the input 1d B compression point is greater than-6.84 d Bm,and the operating current is52.07?53.81 m A.The layout size is 1159?m×1051?m,and the core size is 712?m×964?m.The active phase shifter designed in this paper meets the design index requirements and can be used in phased array radar beamforming chips.