Development Of Key Technologies For Cross-scale Surface Topography Measurement Based On Zero Abbe Error Principle

In recent years,cross-scale measurement requirements for product topography have emerged in the integrated circuit,precision manufacturing,and semiconductor industries.The scale ratio requirements for range and accuracy have reached 10~6,which exceeds the indicators of traditional topography measurement instruments.At the same time,the Abbe error in this type of instrument is worthy of attention.For this reason,this paper proposes the use of a large-stroke mechanical motion platform equipped with high-resolution sensors to achieve large-scale and high-precision measurement,combined with error compensation to improve accuracy to achieve zero Abbe error cross-scale topography measurement.This article first studies the mechanical hardware structure of the instrument.In order to solve the over-constraint problem in the system and reduce the hardware cost,a modular mechanical hardware design and a non-rigid connection method based on ball-to-socket are adopted.In the end,only general precision components were used to build a two-dimensional mechanical motion platform with a stroke of 100mm×100mm,which has good scalability and stability.Afterwards,on the basis of mechanical hardware,the potential sources of error were analyzed.In order to solve the Abbe error,a sensor detection system with a three-line common point arrangement was added,and a stationary measurement coordinate system was constructed,which satisfies the Abbe principle.In order to solve the coupling error problem,a differential measurement method based on a optical flat is proposed.The experimental results show that the method is feasible and effective for compensating the coupling error in the z direction;a contact sensor coupling method is proposed with a detection module measuring the coupling error in the xy direction,the experimental results show that the return error of the method can be linearly corrected,and the method has certain feasibility.Finally,to study the performance of the current prototype and the feasibility of the proposed method.The experimental research was carried out on the basis of the built software and hardware.The results of the repeatability experiment show that the global standard deviation of repeated measurements on the steps of the gauge block is 0.27?m,and the system has good measurement repeatability.The reproducibility experiment shows that the overall standard deviation of the step height of the gauge blocks placed in different positions of the system range is 0.39?m,and the system has good reproducibility.Surface topography measurement experiments show that the system's evaluation of roughness has reached the performance of commercial instruments,the overall standard deviation of the measurement of more complex two-dimensional topography can reach 0.16?m,and it has the reconstruction capability of three-dimensional topography.