Study On Fabrication Method And Processing Technology Of Nanofludic Chip With Nanobundles

Nanofluidic chip has great potential for applications in areas ranging from disease diagnosis,bioanalysis and environmental detection due to its nanoscale-size advantage.Nanochannel is the key component to implement the performance of nanofluidic chip.It is shown that nanofludic chip with the array of nanochannels could significantly improve the sensitivity compared with single channel.However,traditional processing techniques such as conventional photography,electron beam lithography and nanoprinting lithography due to expensive equipment,high environmental demanding and complex processing limit the development of the nanofludic chip.AFM based nanomachining technique has specific advantages,including simple machining process and high fabricating efficiency,which has been proved to be an effective way to process nanochannel.AFM based nanobundles machining method could directly produce nanobundles with probe reciprocal scanning.This method is expected to be able become an important method of processing array of nanochannels.However,nanobundles still could not be suitable for nanofludic preparation due to poor groove consistency and high pile-up.Based on the above reasons,this research focused on formation mechanism and the processing optimization of nanobundles to fabricate the controllable and consistent nanochannel array.By combining photolithography,transfer and bonding techniques,nanofludic chip with nanochannel array was successfully prepared.The experiments of conductivity and DNA molecular detection were tested.The specific research contents are as follow.The influence of the scanning number and feed on the formation process of nanobundles was first studied,and the formation mechanism of nanobundles was analyzed based on the experimental results and stick-slip motion model.The effect of machining parameters such as scanning velocity,scanning direction and normal load on the law of pile-up and groove of the nanobundles was studied and optimized to fabricate high quality of nanobundle structures.Based on the optimization of transfer printing process,the PDMS nanochannel array template with controllable size was prepared.Finally,the nanofludic chip with nanochannel array weas fabricated combining photolithography,transfer and bonding techniques.The feasibility of nanofludic chip was verified by ionic conduction experiment.Besides,the performance of the nanofludic chip with nanochannel array and single channel was compared with ionic conduction experiment to verify the high sensitivity of the nanofludic chip with nanochannel array.Moreover,the nanochannel was modified and DNA molecule detection application experiment was carried out,which lays the foundation for expanding the application of nanofludic chip with AFM based nanomachining technology.