Sliding Mode Control Of Core Servo Axis In Advanced Packaging Flip Chip Equipment

The level of a country's semiconductor field is not only related to economic development,but also to national security.Packaging process is one of the key processes in the semiconductor industry chain.Advanced packaging flip chip equipment based on advanced flip chip packaging process is an important equipment of packaging process.In view of the current situation and policies at home and abroad,it is of great significance to study the core components and technologies of flip chip equipment.Permanent Magnet Linear Synchronous Motor(PMLSM)is often used as the core axis of advanced packaging equipment because of its excellent performance.In industry,PID control is the most common control method,but PID control is more sensitive to the change of internal or external environment of the motor.Based on the core component PMLSM of advanced flip chip equipment,this thesis proposes the use of sliding mode control to study the control technology of PMLSM.As analyzed above,contents of this thesis are as follows:(1)The status of flip chip equipment and PMLSM at home and abroad are investigated.The commonly used control methods of PMLSM are summarized and flip chip packaging technology and the role of PMLSM as core axis in flip chip equipment are introduced.The structure and principle of PMLSM are analyzed,and the model of PMLSM was simplified according to the current and voltage equations and dynamics equations.The control mode of i_d=0 is selected to control PMLSM.Simulation model of PMLSM is built to verify the algorithm in MATLAB/Simulink.(2)Based on the principle of non-singular terminal sliding mode control,a non-singular terminal sliding mode controller is designed.And through Simulink,the speed of system error convergence is higher than the traditional linear sliding mode,which verifies the effectiveness of the controller.The self-adaptive non-singular terminal sliding mode controller based on the backstepping control method is designed and proved by simulation,which enhances the robustness of the system.Boundary layer is designed to reduce the chattering phenomenon.(3)The high-order sliding mode control is studied because of the chattering and the boundary layer.The common control algorithms of second-order sliding mode are compared and analyzed,and the super-twisting algorithm is selected to design the controller.Through simulation,the super-twisting controller can avoid chattering clearly.On this basis,a disturbance observer based on the super-twisting algorithm is designed to estimate the disturbance adaptively.Simulation results show that the disturbance observer can work accurately.(4)The experimental platform is built.The control algorithms studied in this thesis are realized by C Programming Language,and the generated algorithm file is loaded into the DSP core of the motion control card to realize control.The control algorithms include the adaptive non-singular terminal controler,the controler based on super-twisting algorithm and a disturbance observer based on super-twisting algorithm.Operation software is built.Experimental results show that the robustness enhancement effect of adaptive NTSM on general NTSM and the chattering suppression effect of boundary layer.It is proved that the positioning accuracy and positioning time of super-twisting controler can meet the requirement based on flip chip equipment,and the effectiveness of the disturbance observer is verified.