Design,simulation And Experiment Of XY? Flexible Micro-motion Stage For MicroLED Panel Repair

With the rapid development of third-generation semiconductors,light semiconductor manufacturing equipment with Micro LED as the core has become a research focus at home and abroad.For Micro LED panels that may have defects such as leakage,deflection,and misalignment during the manufacturing process,precise alignment operations need to be implemented in the process of panel defect repair.Therefore,it is necessary to study the large-stroke,high-precision,high-speed XY?precision positioning stage for the defect repair process of the Micro LED panel.This paper has carried out in-depth research on the new XY? micro-positioning stage based on flexible hinges,carried out the statics,dynamics and kinematics modeling of the micro-platform,and simulated and analyzed the input stiffness,output flexibility,magnification ratio,etc.of the designed micro-stage mechanism.Performance indicators,the micro-vision closed-loop experimental system of the ? micro-rotation stage was built,and the IMC-PID control strategy with speed feed forward was proposed to verify the stage's positioning accuracy,resolution,tracking error and other performance.The main results of the thesis are summarized as follows:1.According to the needs of Micro LED panel defect repair equipment,analyze the current research status at home and abroad,such as flexible positioning stages with various degrees of freedom,compliant mechanism dynamics and statics modeling methods,and electromechanical coupling system control strategies,and clarify the main research in this paper Content and technical solutions.2.Design new XY and ? micro-positioning stage structure.Select the appropriate driver and material of the compliance mechanism,and design a new type of compliance magnification mechanism and motion guide mechanism.Among them,the XY parallel compliant mechanism adopts a composite bridge type amplifying mechanism with rounded V-shaped flexible hinges,and a new type motion guide mechanism SP2 is used to connect the amplifying mechanism and the stage,and the overall arrangement is fully symmetric.The ? micro-slewing stage adopts a new type of bridge-type lever hybrid amplification mechanism,and the slewing mechanism adopts a diagonally symmetrical arrangement.3.Based on the flexibility matrix method,the statics models of the XY micro-motion stage and the ? micro-rotation stage amplification mechanism are established,and the input flexibility matrix and displacement amplification ratio are obtained.Based on the Lagrangian energy equation,the dynamic models of the XY compliant mechanism and the ? compliant amplifying mechanism are derived,and the first-order natural frequency is obtained;the kinematics model of the ? rotary mechanism is established to obtain the output displacement and angular deflection of the amplifying mechanism Relationship to verify the rationality of the angular displacement of the slewing mechanism.4.Based on ANSYS finite element simulation tool,perform static simulation on composite bridge magnification mechanism,bridge lever hybrid magnification mechanism,XY and ? micro-positioning stage to verify the working space,coupling,maximum stress,magnification ratio,and input stiffness of the stage Perform dynamic simulation on the XY? micro-positioning stage and verify the natural frequency of the stage.5.The experimental prototype construction and control realization of the ?micro-slewing stage,the experimental system of the ? micro-slewing stage,the open-loop test stage hysteresis characteristics,amplification ratio,maximum rotation angle,natural frequency and other working performance;and the system is modeled And parameter identification,the IMC-PID control strategy with speed feed forward is proposed.Based on the micro-vision closed-loop feedback,the positioning accuracy,resolution and tracking error of the ? micro-slewing stage are verified.The experimental results show that the designed ? micro-slewing stage has good angular displacement positioning accuracy.