Mechanical Analysis And Research On Fabrication Technology Of Magnetically Controlled Micromanipulator

Magnetically controlled micromanipulator is a kind of micro-operating system which integrates electromagnetic drive and control part and micro mechanical gripping mechanism.It has a wide application prospect in biology,medical treatment and MEMS.In this paper,two different kinds of micromanipulator are proposed for the micro-electromechanical system(MEMS)and intelligent composite microstructure(SCM)processing system,and the mechanic analysis and processing technology of the micromanipulator structure are carried out.The main contents are as follows:A micro-manipulator with flexible hinge and four-bar mechanism based on MEMS is designed,and its structure and working principle are analyzed.The molecular forces in the process of clamping micro wave generator are solved by using Hamaker hypothesis,and the coupled force analysis of the clamping process is carried out.The results show that the designed micromanipulator can pick up the micro wave generator smoothly.A composite flexure-hinge micromanipulator based on intelligent composite structure(SCM)is designed,and its structure and working principle are analyzed.The design requirements of the composite flexure hinge mechanism are analyzed.The coupled mechanic analysis of the clamping process for nano-Si3N4 spheres is carried out.The results show that the designed micromanipulator can pick up the nano-Si3N4 spheres smoothly.The machining technology of the micromanipulator in MEMS is studied,and the reasonable processing parameters of each processing step are determined.Using ultraviolet exposure machine,vacuum coating machine and atomic force microscope,the four-bar mechanism with flexible hinge designed in MEMS system is processed,and the micromagnetic colloid four-bar mechanism is fabricated successfully.The processing technology of micromanipulator under SCM system is studied,and the reasonable processing parameters of each processing step are detdemined.Using vacuum compressor,laser cutting machine and other equipment,the processing experiments of the flexible hinge mechanism under the intelligent composite microstructure system are carried out,and the whole structure of the composite manipulator with magnetic uniform is prepared successfully.