Research On Optical Fiber Micro-nano Sensor And Mobile Phone Measurement System

Since the 1970s,due to unique characteristics of small size,anti-interference,corrosion resistance and high sensitivity,optical fiber micro-nano sensor have become hot research direction in various fields.Among them,fiber-optic thin film temperature sensors and microstructure sensors,which own high integration and stability,become the most commonly used sensors for ambient temperature and refractive index monitoring.With the rapid development of optical fiber micro-nano sensor,the demand for sensor measurement methods is also increasing,the problems of high price and complex structure in traditional measurement methods are gradually exposed.In view of the above advantages and problems,this article designs TiO₂ thin film temperature sensor and periodic licrostructure sensor,and studies the measurement system of optical fiber micro-nano sensor by smartphone.While improving and perfecting the existing sensor technology,it can also solve the problems encountered in the development of sensor integration and intelligent,and has a good application prospect in the fields of biochemistry and medical treatment.TiO₂ thin film temperature sensor is designed and fabricated.TiO₂ thin film is prepared by magnetron sputtering technology,and high-quality dense uniform film layer is obtained by analyzing sputtering influence factors.The TiO₂ film is transferred to the end face of quartz fiber to complete the fabrication of the TiO₂ thin film temperature sensor,applied to the analysis of the ambient temperature.The sensor has simple and controllable structure,convenient manufacture and good application value.Periodic microstructure sensors is designed and fabricated.Large-area dense and ordered hexagonal colloidal microsphere monolayer film is prepared by microfluidic injection technique.Using this as a template,metal Ag deposition and colloidal microspherical modification are achieved by colbing with magnetron sputtering and reactive ion etching technology.The fabrication of periodic microstructure sensor is completed and applied to the monitor of environmental refractive index.The sensor has the advantages of simple structure,high precision and fast response.The measuring system of monitoring optical fiber micro-nano sensor by smartphone is designed and completed.New package structures are fabricated and measurement application is written,which combines smartphone,diffraction grating with sensors,and uses the flash and camera as light source and image acquisition tool.According to the principle of single-slit diffraction and multi-beam interference,the incident light irradiated onto the grating can be dispersed according to the different wavelength.The dispersion image is obtained by using the smartphone.The dispersion image is processed by the measurement application to obtain the reflected light intensity spectrum of the sensor,realizing the monitor and performance analysis of the sensor.Compared with the traditional test method,the measurement method is simpler,more integrated and convenient,and creates more possibilities for the development of the sensor.