Study On Magnetic Levitation Moving Platform With Planar Coil

With the development of manufacturing technology,a higher precision stage is needed to meet the high precision manufacturing,metrology and assembly technology which can be used for various occasions.Positioning stage with large scale and high precision are the goal of our pursuit.The research presented in this paper focus on the structural design and optimization of magnetic levitation moving platform with planar coil,focusing on convex Halbach permanent magnet array as mover and the planar coil as stator,hardware and software system with high performance and high reliability,and at last,using PID control to validate the feasible and positioning performance of the system linear motor.As the driving part of the platform,the driving stability and plane precision of the permanent magnet linear motor are the guarantee of the stage's function.On this basis,we presented the structural design of the stage,including permanent magnet array and planar coil's study and design,Then,we analyzed the electromagnetic force of linear motor,not only its mathematical representation but also in finite element methods.Based on the SVPWM theory of linear motor control and the power drive demands of the stage,the driver model for the stage was designed;A DSP + FPGA digital controller was designed,including the hardware and software design,integrated design for DSP and FPGA,communication for the controller and upper computer.At last,PID control was used for verifying the validity of the magnetic levitation moving platform,the feasible of the control system.